Introduction to modern micro- and nanosystem engineering. Textbook
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The main content of the concepts "microsystem" and "microsystem technology" has been revealed. Questions of design, manufacturing, and experimental verification of microsystems are considered for general acquaintance. Silicon is presented as the main material of modern electronics. A sequential description of the technology for producing monocrystalline silicon and manufacturing silicon wafers is given. Modern microelectronic production and the standard technological operations used in it are presented. A conclusion is drawn on the application of the described technologies for the production of micro- and nanosystems technology. For students studying in the programs of preparation 12.04.01 "Instrumentation" and 28.03.01 "Nanotechnology and Microsystems Technology," for colleges in the microelectronics field, and a wide range of readers.
Author:
Author:Gridchin Alexander Viktorovich
Cover:
Cover:hardcover
Category:
- Category:Computer & Technology
- Category:Engineering & Transportation
Dimensions:
Dimensions:21.7x15.4x1.4 cm
ISBN:
ISBN:978-5-9729-1613-9
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