Technological processes in micro and nanoelectronics. Tutorial
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The main provisions of the physics of the solid body and physical chemistry of semiconductors are considered. The main attention is paid to the technology that corresponds to the equipment and equipment used to obtain a technological layer. Specific examples of solving reverse problems are given to determine the technological modes of obtaining layers with specified parameters. Regulatory work in industrial production is highlighted. The main environmental problems in industrial technologies are considered.
For students studying in the specialty 11.00
For students studying in the specialty 11.00
Author:
Author:Rodionov Yuri Anatolyevich
Cover:
Cover:Hard
Category:
- Category:Arts & Photography
- Category:Engineering & Transportation
- Category:Medical Books
- Category:Agriculture
Publication language:
Publication Language:Russian
Paper:
Paper:Offset
ISBN:
ISBN:978-5-9729-0337-5
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