Synthetic diamond for electronics and optics
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The book sets out the current state, the possibilities and prospects of using diamond in various areas of electronics, optics and technology. A generalization of the experience of existing and promising technical solutions to create diamond semiconductor films, technologies for growing high -quality, high -clean diamond monocrystalline films, their alloying and obtaining nanostructures. The electrophysical and photoelectric properties of such structures are described.
Due to the fact that the main attention is paid to obtaining diamond semiconductor films using the chemical precipitation from the gas phase (CVD method), information is given about the main types of microwave reactors and about organizations (scientific groups) operating on the front edge of the technology and CVD-almaz studies. The uniqueness of the properties of diamond but compared with other semiconductor materials for the development and creation of promising electronic devices is noted. The main problem of the introduction of diamond into modern electronics and optics is discussed - the absence of a monocrystalline diamond in the form of large plates suitable for technology of photolithography, as well as ways to solve it. The book is intended for scientists, technologists and engineers working on the creation of optoelectronic devices and devices of semiconductor electronics based on diamond. It may be useful to teachers, graduate students and students of technical universities, researchers, engineers and developers
Due to the fact that the main attention is paid to obtaining diamond semiconductor films using the chemical precipitation from the gas phase (CVD method), information is given about the main types of microwave reactors and about organizations (scientific groups) operating on the front edge of the technology and CVD-almaz studies. The uniqueness of the properties of diamond but compared with other semiconductor materials for the development and creation of promising electronic devices is noted. The main problem of the introduction of diamond into modern electronics and optics is discussed - the absence of a monocrystalline diamond in the form of large plates suitable for technology of photolithography, as well as ways to solve it. The book is intended for scientists, technologists and engineers working on the creation of optoelectronic devices and devices of semiconductor electronics based on diamond. It may be useful to teachers, graduate students and students of technical universities, researchers, engineers and developers
Author:
Author:Chuchva Galina Viktorovna, Talipov Niyaz Khatimovich, Khmelnitsky Roman Abramovich
Cover:
Cover:Hard
Category:
- Category:Engineering & Transportation
- Category:Reference books
Publication language:
Publication Language:Russian
Paper:
Paper:White
ISBN:
ISBN:978-5-7974-0558-0
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