Processes and equipment. Microtechnology. Modules 1 and 2. Textbook

A description of the general sequence of processes of microtechnology on examples of the production of integrated chips and a silicon pressure microdant. The main stages of obtaining silicon monocrystalline plates, key operations of microtechnology are considered - the manufacture of silicon plates, oxidation. Attention was focused on the relationship between the properties of materials, structure, device and electrical characteristics of microstructures. Physico-chemical models and methods for analyzing the quality of technological processes of microtechnology are considered.

For students of MGTU named after N.E. Bauman, students in the areas of Electronics and Nanoelectronics and "Nanoineneria"