Microdants and microsystems
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The designs and principles of the main types of microdathers and microsystems are presented, developed and used at present. Definitions are given to the main terms used in a microsystem technique. A list of metrological parameters characterizing the microsystem as a measuring device is given. A separate issue considered computer modeling and design of microsystems based on the ANSYS software package.
For students studying in training programs 04/12/01 "Instrumentation" and 03/28/01 "nanotechnology and microsystem technology"
For students studying in training programs 04/12/01 "Instrumentation" and 03/28/01 "nanotechnology and microsystem technology"
Author:
Author:Гридчин Александр Викторович
Cover:
Cover:Hard
Category:
- Category:Engineering & Transportation
- Category:Reference books
Publication language:
Publication Language:Russian
Paper:
Paper:Offset
ISBN:
ISBN:978-5-9729-1220-9
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