Introduction to the technology of materials of microelectronics. Part 3. Epitaxial growth. Textbook for universities
Please sign in so that we can notify you about a reply
The main types of epitaxial technologies are represented. The design and main parameters of the most common types of epitaxial growth were considered.
The requirements for epitaxial substrates are formulated and the main stages of their preparation for epitaxia are described. The features of embryo formation in heterogeneous systems are considered. The classification of types and mechanisms of epitaxia is presented. The structural features of the epitaxial systems are classified on the basis of a bicristallographic approach, with the involvement of the concepts of the metric and symmetrical discrepancy of the components of the epitaxial pair. The methodology for identifying orientation ratios in hetero -Epiphysial systems, the main sources of elastic stresses and the mechanisms of their relaxation.
The textbook is intended for bachelors studying in the areas of Electronics and Nanoelectronics and Nanotechnology and Microsystemic Technology has been considered. It can be useful for graduate students and researchers specializing in the problems of epitaxial technologies
The requirements for epitaxial substrates are formulated and the main stages of their preparation for epitaxia are described. The features of embryo formation in heterogeneous systems are considered. The classification of types and mechanisms of epitaxia is presented. The structural features of the epitaxial systems are classified on the basis of a bicristallographic approach, with the involvement of the concepts of the metric and symmetrical discrepancy of the components of the epitaxial pair. The methodology for identifying orientation ratios in hetero -Epiphysial systems, the main sources of elastic stresses and the mechanisms of their relaxation.
The textbook is intended for bachelors studying in the areas of Electronics and Nanoelectronics and Nanotechnology and Microsystemic Technology has been considered. It can be useful for graduate students and researchers specializing in the problems of epitaxial technologies
Author:
Author:Александрова Ольга Анатольевна
Cover:
Cover:Hard
Category:
- Category:Engineering & Transportation
- Category:Reference books
ISBN:
ISBN:978-5-507-45481-5
No reviews found