Integrated circuit technology
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The issues of technology for the production of integrated microcircuits are set out. The main attention is paid to the formation of the structure of semiconductor chips. The technology for obtaining thin films in hybrid integrated schemes has been considered.
For students studying in the field of training 11.03.03 "Design and Electronic tools", profile "Design and electronic tools"
For students studying in the field of training 11.03.03 "Design and Electronic tools", profile "Design and electronic tools"
Author:
Author:Смирнов Виталий Иванович
Cover:
Cover:Hard
Category:
- Category:Engineering & Transportation
- Category:Reference books
Publication language:
Publication Language:Russian
Paper:
Paper:Offset
ISBN:
ISBN:978-5-9729-1232-2
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