Fundamentals of the technology of the electronic component base
Please sign in so that we can notify you about a reply
The foundations of the technology for the production of integrated microcircuits are considered. Technological operations for the manufacture of the main elements of micro- and nanoelectronics, such as the production of semiconductor plates, their alloying, applying thin films, photolithography, etching, metallization, control of the production process.
For students studying in the field of training 11.03.04 "Electronics and nanoelectronics"
For students studying in the field of training 11.03.04 "Electronics and nanoelectronics"
Author:
Author:Bodrov Evgeny Eduardovich
Cover:
Cover:Hard
Category:
- Category:Engineering & Transportation
- Category:Reference books
ISBN:
ISBN:978-5-9729-0846-2
No reviews found