Chemical technologies in the production of microelectromechanical systems
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The main provisions of general and physical chemistry in the technological processes of integrated chips and microelectromechanical systems are considered. The main attention is paid to chemical processes in the serial production of micro and nanoelements, materials and equipment that provides these processes. Specific technological processes of chemical preparation and processing of technological layers and their features in serial production are given.
A textbook is intended for students of higher educational institutions studying in the areas of preparation of undergraduate and magistracy Electronics and Nanoelectronics, Design and technology of electronic tools
A textbook is intended for students of higher educational institutions studying in the areas of preparation of undergraduate and magistracy Electronics and Nanoelectronics, Design and technology of electronic tools
Author:
Author:Rodionov Yuri Anatolyevich
Cover:
Cover:Hard
Category:
- Category:Engineering & Transportation
- Category:Reference books
ISBN:
ISBN:978-5-8114-5788-5
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