Basic technologies of micro- and nanoelectronics. Tutorial

The textbook was developed in accordance with the State Educational Standard of Higher Professional Education in the direction of training of certified specialists on 04/11/04 “Electronics and Nanoelectronics”. For the first time, micro- and nanoelectronics technologies are considered inextricably considered with the technologies of high-clean substances and materials in the fundamental way High purity of material- high quality products. The main processes of obtaining high -artistic substances and materials based on them, the processes and technologies for obtaining epitaxial structures of silicon, arsenide gallium, etc., technologies for their processing when moving to components of electronic technology are considered.
The manual can be used by students of all forms of training, including related specialties, both for independent work and the implementation of course projects, as well as as a lecture noteship on the course Technology of Materials of Electronic Technique. Contains a list of control issues for assessing the assimilation of material by students