Practice of precision laser processing

The book is devoted to the consideration of the practice of precision laser processing and is based on the results of copyright works obtained in the EMS in the period 1963-1993. and in the NPC "Laser and Equipment TM" in the period 1998-2012, as well as on the analysis of numerous works of domestic and foreign researchers published in open sources. The book gives a definition of the concept of laser precision processing and a review of the main areas of its applications is presented. The patterns of laser drilling, cutting, milling and separation of the material with impulses of laser radiation with a duration of milliseconds to hundreds of femtoseconds have been studied. The processes of the formation of the hole during laser drilling over time, the effect on the shape of the frequency of the impulses, the shielding of radiation on the products of ablation, the formation of thermal fuffs in the treatment zone leading to crack formation. A classification of the process of laser cutting of materials was carried out, the basic laws of this process were formulated and explained. Experimentally established modes of optimal cutting of various materials using various types of impulse and continuous lasers, allowing to provide requirements for precision and high -quality processing. The methodology for selecting such modes has been considered and explained. It is analyzed in which cases it is advisable to use laser milling and how it should be carried out. Practical examples of laser milling are given.
The prospects and capabilities of the technology for the separation of semiconductor and dielectric materials are considered through the use of laser thermal controlling mechanisms and the formation of destruction in the material of the internal zones.
The final section of the book provides technical data and design features of various types of domestic technological installations for precision processing, which are developed and produced by the NPC "lasers and equipment of TM".
The book is designed for specialists of research, technological and production units of industrial enterprises using laser technologies. It will also be useful for students and graduate students studying laser processing processes