Ionic and photon processing of materials

Modern ideas about the physics of the interaction of ion beams with solid bodies are presented, the issues of the formation and annexation of defects of the crystal lattice, the formation of the specified profiles of the distribution of alloying atoms are discussed. Data on modern equipment used for ion and photographic processing of materials, as well as for changing the properties of ion-implanted layers. Applications of ionic and photographic processing in modern technologies of microelectronics and solid -state electronics are considered.
For students of higher education institutions studying the physics of semiconductor materials, solid physics, physical electronics, microelectronics, methods of mathematical physics